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US08097222B2 Microfluidic device with integrated micropump, in particular biochemical microreactor, and manufacturing method thereof 有权
具有集成微型泵，特别是生化微反应器的微流体装置及其制造方法

  • Patent Title: Microfluidic device with integrated micropump, in particular biochemical microreactor, and manufacturing method thereof
  • Patent Title (中): 具有集成微型泵，特别是生化微反应器的微流体装置及其制造方法
  • Application No.: US11914125
    Application Date: 2006-05-10
  • Publication No.: US08097222B2
    Publication Date: 2012-01-17
  • Inventor: Mario Giovanni Scurati
  • Applicant: Mario Giovanni Scurati
  • Applicant Address: IT Agrate Brianza
  • Assignee: STMicroelectronics, S.r.l.
  • Current Assignee: STMicroelectronics, S.r.l.
  • Current Assignee Address: IT Agrate Brianza
  • Agency: Boulware & Valoir
  • Priority: EP05425314 20050512
  • International Application: PCT/EP2006/062224 WO 20060510
  • International Announcement: WO2006/120221 WO 20061116
  • Main IPC: B01L3/00
  • IPC: B01L3/00
Microfluidic device with integrated micropump, in particular biochemical microreactor, and manufacturing method thereof
Abstract:
A microfluidic device for nucleic acid analysis includes a monolithic semiconductor body (13), a microfluidic circuit (10), at least partially accommodated in the monolithic semiconductor body (13), and a micropump (11). The microfluidic circuit (10) includes a sample preparation channel (18) formed on the monolithic semiconductor body (13) and at least one microfluidic channel (20, 22) buried in the monolithic semiconductor body (13). The micropump (11), includes a plurality of sealed chambers (40) provided with respective openable sealing elements (41) and having a first pressure therein that is different from a second pressure in the microfluidic circuit (10). In addition, the micropump (11) and the microfluidic circuit (10) are configured so that opening the openable sealing elements (41) provides fluidic coupling between the respective chambers (40) and the microfluidic circuit (10). The openable sealing elements (41) are integrated in the monolithic semiconductor body (13).
Abstract(Chinese):

用于核酸分析的微流体装置包括至少部分地容纳在单片半导体本体（13）中的单片半导体本体（13），微流体电路（10）和微型泵（11）。 微流体回路（10）包括形成在单片半导体本体（13）上的样品制备通道（18）和埋在单片半导体本体（13）中的至少一个微流体通道（20,22）。 微型泵（11）包括多个密封室（40），其设置有相应的可开启的密封元件（41），并且其中具有与微流体回路（10）中的第二压力不同的第一压力。 此外，微型泵（11）和微流体回路（10）被构造成使得可打开的密封元件（41）的打开在相应的腔室（40）和微流体回路（10）之间提供流体耦合。 可打开的密封元件（41）集成在单片半导体本体（13）中。

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