Invention Grant
- Patent Title: Electroconductive tin oxide having high mobility and low electron concentration
- Patent Title (中): 具有高迁移率和低电子浓度的导电氧化锡
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Application No.: US12684354Application Date: 2010-01-08
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Publication No.: US08097302B2Publication Date: 2012-01-17
- Inventor: Roman Y. Korotkov , David A. Russo , Thomas D. Culp , Gary S. Silverman , Pierre Beaujuge
- Applicant: Roman Y. Korotkov , David A. Russo , Thomas D. Culp , Gary S. Silverman , Pierre Beaujuge
- Applicant Address: US PA King of Prussia
- Assignee: Arkema Inc.
- Current Assignee: Arkema Inc.
- Current Assignee Address: US PA King of Prussia
- Agent Steven D. Boyd; Kimberly R. Hild
- Main IPC: C23C16/06
- IPC: C23C16/06 ; C23C16/40
Abstract:
Tin oxide having high mobility and a low electron concentration, and methods for producing layers of the tin oxide layers on a substrate by atmospheric pressure chemical vapor deposition (APCVD) are disclosed. The tin oxide may undoped polycrystalline n-type tin oxide or it may be doped polycrystalline p-type tin oxide. When the layer of tin oxide is formed on a crystalline substrate, substantially crystalline tin oxide is formed. Dopant precursors for producing doped p-type tin oxide are also disclosed.
Public/Granted literature
- US20100117035A1 ELECTROCONDUCTIVE TIN OXIDE HAVING HIGH MOBILITY AND LOW ELECTRON CONCENTRATION Public/Granted day:2010-05-13
Information query
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