Invention Grant
US08097474B2 Integrated circuit chip design flow methodology including insertion of on-chip or scribe line wireless process monitoring and feedback circuitry 有权
集成电路芯片设计流程方法,包括插入片上或划线无线过程监控和反馈电路

Integrated circuit chip design flow methodology including insertion of on-chip or scribe line wireless process monitoring and feedback circuitry
Abstract:
Disclosed are embodiments of a design and manufacturing system and an associated method that allow for design analysis and for insertion, during wafer manufacture, of intra-process monitoring circuitry. These embodiments use a library of pre-qualified intra-process monitoring circuits and a cross-correlation table that links different monitoring circuits with different IC chip components. Specifically, these embodiments analyze integrated circuit chip design data to identify the components designed into the chip. Then, one or more intra-process monitoring circuits are selected from the library and the design data is modified to include the selected monitoring circuit(s).
Information query
Patent Agency Ranking
0/0