Invention Grant
- Patent Title: Method for producing a solid-state imaging element
- Patent Title (中): 固体摄像元件的制造方法
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Application No.: US12656925Application Date: 2010-02-19
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Publication No.: US08097486B2Publication Date: 2012-01-17
- Inventor: Hideo Kido , Kazuichiro Itonaga , Kai Yoshitsugu , Kenichi Chiba
- Applicant: Hideo Kido , Kazuichiro Itonaga , Kai Yoshitsugu , Kenichi Chiba
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Rader, Fishman & Grauer PLLC
- Priority: JP2007-094755 20070330
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
There is provided a solid-state imaging element having a light receiving part generating charges by light irradiation, and a source/drain region of a transistor, both formed in a semiconductor layer. The solid-state imaging element includes a non-silicided region including the light receiving part, in which surfaces of the source/drain region and a gate electrode of the transistor are not silicided; and a silicided region in which the surfaces of the source/drain region and the gate electrode of the transistor are silicided. The non-silicided region has a sidewall formed on a side surface of the gate electrode of the transistor, a hydrogen supply film formed to cover the semiconductor layer, the gate electrode, and the sidewall, and a salicide block film formed on the hydrogen supply film to prevent silicidation. The silicided region has a sidewall formed on the side surface of the gate electrode of the transistor.
Public/Granted literature
- US20100167450A1 Solid-state imaging element and method for producing the same Public/Granted day:2010-07-01
Information query
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