Invention Grant
US08097487B2 Method for making a phase change memory device with vacuum cell thermal isolation
有权
用于制造具有真空室热隔离的相变存储器件的方法
- Patent Title: Method for making a phase change memory device with vacuum cell thermal isolation
- Patent Title (中): 用于制造具有真空室热隔离的相变存储器件的方法
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Application No.: US12907286Application Date: 2010-10-19
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Publication No.: US08097487B2Publication Date: 2012-01-17
- Inventor: Hsiang-Lan Lung
- Applicant: Hsiang-Lan Lung
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes Beffel & Wolfeld LLP
- Agent James F. Hann
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A memory device with improved thermal isolation. The memory cell includes a first electrode element, having an upper surface; an insulator stack formed on the first electrode element, including first, second and third insulating members, all generally planar in form and having a central cavity formed therein and extending therethrough, wherein the second insulator member is recessed from the cavity; a phase change element, generally T-shaped in form, having a base portion extending into the cavity to make contact with the first electrode element and making contact with the first and third insulating members, and a crossbar portion extending over and in contact with the third insulating member, wherein the base portion of the phase change element, the recessed portions of the second insulating member and the surfaces of the first and third insulating members define a thermal isolation void; and a second electrode formed in contact with the phase change member.
Public/Granted literature
- US20110034003A1 Vacuum Cell Thermal Isolation for a Phase Change Memory Device Public/Granted day:2011-02-10
Information query
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