Invention Grant
US08097518B2 Semiconductor device and manufacturing method therefor 有权
半导体装置及其制造方法

  • Patent Title: Semiconductor device and manufacturing method therefor
  • Patent Title (中): 半导体装置及其制造方法
  • Application No.: US12898968
    Application Date: 2010-10-06
  • Publication No.: US08097518B2
    Publication Date: 2012-01-17
  • Inventor: Masatomi Okanishi
  • Applicant: Masatomi Okanishi
  • Applicant Address: US CA Sunnyvale
  • Assignee: Spansion LLC
  • Current Assignee: Spansion LLC
  • Current Assignee Address: US CA Sunnyvale
  • Main IPC: H01L21/336
  • IPC: H01L21/336
Semiconductor device and manufacturing method therefor
Abstract:
There is provided a semiconductor device including a semiconductor substrate (10), a high concentration diffusion region (22) formed within the semiconductor substrate (10), a first low concentration diffusion region (24) that has a lower impurity concentration than the high concentration diffusion region (22) and is provided under the high concentration diffusion region (22), and a bit line(30) that includes the high concentration diffusion region (22) and the first low concentration diffusion region (24) and serves as a source region and a drain region, and a manufacturing method therefor. Reduction of source-drain breakdown voltage of the transistor is suppressed, and a low-resistance bit line can be formed. Thus, a semiconductor device that can miniaturize memory cells and a manufacturing method therefor can be provided.
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