Invention Grant
- Patent Title: Phase change memory cell structures and methods
- Patent Title (中): 相变存储单元结构和方法
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Application No.: US12787070Application Date: 2010-05-25
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Publication No.: US08097537B2Publication Date: 2012-01-17
- Inventor: Timothy A. Quick , Eugene P. Marsh , Joseph N. Greeley
- Applicant: Timothy A. Quick , Eugene P. Marsh , Joseph N. Greeley
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Brooks Cameron & Huebsch, PLLC
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
Phase change memory cell structures and methods are described herein. A number of methods of forming a phase change memory cell structure include forming a dielectric stack structure on a first electrode, wherein forming the dielectric stack structure includes creating a second region between a first region and a third region of the dielectric stack structure, the second region having a thermal conductivity different than a thermal conductivity of the first region and different than a thermal conductivity of the third region of the dielectric stack. One or more embodiments include forming a via through the first, second, and third regions of the dielectric stack structure, depositing a phase change material in the via, and forming a second electrode on the phase change material.
Public/Granted literature
- US20110291065A1 PHASE CHANGE MEMORY CELL STRUCTURES AND METHODS Public/Granted day:2011-12-01
Information query
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