Invention Grant
- Patent Title: Apparatus and method of aligning and positioning a cold substrate on a hot surface
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Application No.: US12839282Application Date: 2010-07-19
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Publication No.: US08097543B2Publication Date: 2012-01-17
- Inventor: Blake Koelmel , Abhilash J. Mayur , Kai Ma , Alexander N. Lerner
- Applicant: Blake Koelmel , Abhilash J. Mayur , Kai Ma , Alexander N. Lerner
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: H01L21/26
- IPC: H01L21/26

Abstract:
Embodiments of the invention contemplate a method, apparatus and system that are used to support and position a substrate on a surface that is at a different temperature than the initial, or incoming, substrate temperature. Embodiments of the invention may also include a method of controlling the transfer of heat between a substrate and substrate support positioned in a processing chamber. The apparatus and methods described herein generally may also provide an inexpensive and simple way of accurately positioning a substrate on a substrate support that is positioned in a semiconductor processing chamber. Substrate processing chambers that can benefit from the various embodiments described herein include, but are not limited to RTP, CVD, PVD, ALD, plasma etching, and/or laser annealing chambers.
Public/Granted literature
- US20100279516A1 APPARATUS AND METHOD OF ALIGNING AND POSITIONING A COLD SUBSTRATE ON A HOT SURFACE Public/Granted day:2010-11-04
Information query
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