Invention Grant
- Patent Title: Apparatus for measuring beam characteristics and a method thereof
- Patent Title (中): 用于测量光束特性的装置及其方法
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Application No.: US12031643Application Date: 2008-02-14
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Publication No.: US08097866B2Publication Date: 2012-01-17
- Inventor: Joseph C. Olson , Atul Gupta
- Applicant: Joseph C. Olson , Atul Gupta
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: G01T1/00
- IPC: G01T1/00

Abstract:
An apparatus and a method for detecting particle beam characteristics are disclosed. In one embodiment, the apparatus may have a body including a first end and second end and at least one detector between the first and second ends. The apparatus may have a transparent state where a portion of the particles entering the apparatus may pass through the apparatus. The apparatus may also have a minimum transparency state where substantially all of the particles entering the apparatus may be prevented from passing through the apparatus and detected. Different transparency state may be achieved by rotating the apparatus or the detector contained therein. With the apparatus, it is possible to detect the beam properties such as the beam intensity, angle, parallelism, and a distribution of the particles in a particle beam.
Public/Granted literature
- US20090206273A1 APPARATUS FOR MEASURING BEAM CHARACTERISTICS AND A METHOD THEREOF Public/Granted day:2009-08-20
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