Invention Grant
US08097883B2 Thin film transistors in pixel and driver portions characterized by surface roughness
有权
具有表面粗糙度的像素和驱动器部分的薄膜晶体管
- Patent Title: Thin film transistors in pixel and driver portions characterized by surface roughness
- Patent Title (中): 具有表面粗糙度的像素和驱动器部分的薄膜晶体管
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Application No.: US11954716Application Date: 2007-12-12
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Publication No.: US08097883B2Publication Date: 2012-01-17
- Inventor: Hong-Ro Lee
- Applicant: Hong-Ro Lee
- Applicant Address: KR Yongin
- Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2006-0130186 20061219
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L29/786 ; H01L27/12

Abstract:
A thin film transistor and a fabrication method thereof, in which one excimer laser annealing (ELA) makes a pixel portion and a driver portion different from each other in surface roughness and grain size. The thin film transistor includes: a substrate including a pixel portion and a driver portion; a first semiconductor layer disposed in the pixel portion and having a first surface roughness; a second semiconductor layer disposed in the driver portion and having a second surface roughness smaller than the first surface roughness; a gate insulating layer formed on the substrate including the first and second semiconductor layers; a first gate electrode placed to correspond to the first semiconductor layer on the gate insulating layer; a second gate electrode placed to correspond to the second semiconductor layer on the gate insulating layer; an interlayer insulating layer formed on the substrate including the first and second gate electrodes; first source and drain electrodes formed on the interlayer insulating layer and electrically connected with the first semiconductor layer; and second source and drain electrodes formed on the interlayer insulating layer and electrically connected with the second semiconductor layer.
Public/Granted literature
- US20080142808A1 THIN FILM TRANSISTOR AND FABRICATION METHOD THEREOF Public/Granted day:2008-06-19
Information query
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