Invention Grant
- Patent Title: Piezoelectric actuator
- Patent Title (中): 压电执行器
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Application No.: US12430371Application Date: 2009-04-27
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Publication No.: US08097999B2Publication Date: 2012-01-17
- Inventor: Doyeol Ahn
- Applicant: Doyeol Ahn
- Applicant Address: KR Seoul
- Assignee: University of Seoul Industry Cooperation Foundation
- Current Assignee: University of Seoul Industry Cooperation Foundation
- Current Assignee Address: KR Seoul
- Agency: Maschoff Gilmore & Israelsen
- Main IPC: H01L41/04
- IPC: H01L41/04 ; H01L41/187
Abstract:
Piezoelectric actuators having a piezoelectric layer in which a cantilever portion is formed are disclosed. In one embodiment, an actuator includes a support layer and a piezoelectric layer. The piezoelectric layer may include a supported portion formed on the support layer and a cantilever portion which extends beyond the support layer.
Public/Granted literature
- US20100270892A1 PIEZOELECTRIC ACTUATOR Public/Granted day:2010-10-28
Information query
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