Invention Grant
- Patent Title: Silicon resonator of the tuning-fork type
- Patent Title (中): 音叉型硅谐振器
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Application No.: US12444846Application Date: 2007-10-08
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Publication No.: US08098002B2Publication Date: 2012-01-17
- Inventor: Jacek Baborowski , Claude Bourgeois , Marc-Alexandre Dubois , David Ruffieux
- Applicant: Jacek Baborowski , Claude Bourgeois , Marc-Alexandre Dubois , David Ruffieux
- Applicant Address: CH Neuchatel
- Assignee: CSEM Centre Suisse d'Electronique et de Microtechnique SA Recherche et Developpement
- Current Assignee: CSEM Centre Suisse d'Electronique et de Microtechnique SA Recherche et Developpement
- Current Assignee Address: CH Neuchatel
- Agency: Young & Thompson
- Priority: CH1606/06 20061009
- International Application: PCT/EP2007/060641 WO 20071008
- International Announcement: WO2008/043727 WO 20080417
- Main IPC: H03H9/19
- IPC: H03H9/19

Abstract:
The invention relates to a silicon resonator (10) of the tuning-fork type in which the linear frequency drift depending on the temperature is compensated. The resonator includes a silicon base (14), a plurality of parallel arms (11, 12, 13) capable of vibrating and actuator (18, 21, 22), wherein the arms include a silicon layer provided between two layers of silicon oxide having a thickness, relative to that of the silicon layer, such that it ensures the first-order compensation of the resonator thermal drift.
Public/Granted literature
- US20100013360A1 SILICON RESONATOR OF THE TUNING-FORK TYPE Public/Granted day:2010-01-21
Information query
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