Invention Grant
US08098076B2 Method and apparatus for terminating a test signal applied to multiple semiconductor loads under test
有权
用于终止应用于被测试的多个半导体负载的测试信号的方法和装置
- Patent Title: Method and apparatus for terminating a test signal applied to multiple semiconductor loads under test
- Patent Title (中): 用于终止应用于被测试的多个半导体负载的测试信号的方法和装置
-
Application No.: US12416375Application Date: 2009-04-01
-
Publication No.: US08098076B2Publication Date: 2012-01-17
- Inventor: Guang Chen , Charles Miller , David Pritzkau
- Applicant: Guang Chen , Charles Miller , David Pritzkau
- Applicant Address: US CA Livermore
- Assignee: FormFactor, Inc.
- Current Assignee: FormFactor, Inc.
- Current Assignee Address: US CA Livermore
- Agency: Kirton & McConkie
- Main IPC: G01R31/20
- IPC: G01R31/20

Abstract:
Apparatus for terminating a test signal applied to multiple semiconductor loads under test is described—for example apparatus for interfacing a test signal between a tester and a semiconductor device under test (DUT). In some examples, a probe card assembly may include at least one probe substrate each having test probes configured to contact test features of a DUT; a wiring substrate, coupled to the at least one probe substrate, having a connector configured for coupling with a source termination of a tester; a signal path formed on and/or in the wiring substrate and the at least one probe substrate, the signal path having a trace and trace stubs fanning out from the trace, an input of the trace being coupled to the connector and outputs of the trace stubs being coupled to the test probes; and a resistive termination coupled between the trace and at least one potential.
Public/Granted literature
- US20100253374A1 Method and apparatus for Terminating A Test Signal Applied To Multiple Semiconductor Loads Under Test Public/Granted day:2010-10-07
Information query