Invention Grant
- Patent Title: Optical system, in particular of a microlithographic projection exposure apparatus
- Patent Title (中): 光学系统,特别是微光刻投影曝光装置
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Application No.: US12968781Application Date: 2010-12-15
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Publication No.: US08098366B2Publication Date: 2012-01-17
- Inventor: Ingo Saenger , Damian Fiolka
- Applicant: Ingo Saenger , Damian Fiolka
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102009055184 20091222
- Main IPC: G03B27/72
- IPC: G03B27/72

Abstract:
An optical system, in particular of a microlithographic projection exposure apparatus, includes an optical system axis and a polarization-influencing optical arrangement, wherein said arrangement has a polarization-influencing optical element which includes an optically active material having an optical crystal axis and is of a thickness profile which varies in the direction of said optical crystal axis, and a position manipulator for manipulation of the position of said polarization-influencing optical element, wherein the polarization manipulator is adapted to cause rotation of the polarization-influencing optical element about an axis of rotation, wherein said axis of rotation is arranged at an angle of 90°±5° relative to the optical system axis.
Public/Granted literature
- US20110149261A1 OPTICAL SYSTEM, IN PARTICULAR OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS Public/Granted day:2011-06-23
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