Invention Grant
- Patent Title: Beam scanner and surface measurement apparatus
- Patent Title (中): 光束扫描仪和表面测量仪器
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Application No.: US12613212Application Date: 2009-11-05
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Publication No.: US08098382B2Publication Date: 2012-01-17
- Inventor: Tak Gyum Kim , Bae Kyun Kim
- Applicant: Tak Gyum Kim , Bae Kyun Kim
- Applicant Address: KR Gyunggi-do
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Gyunggi-do
- Agency: McDermott Will & Emery LLP
- Priority: KR10-2009-0009747 20090206
- Main IPC: G01N21/00
- IPC: G01N21/00

Abstract:
Disclosed are a beam scanner and a surface measurement apparatus. The beam scanner includes a spinning mirror having top and bottom reflective surfaces and a plurality of side reflective surfaces between the top and bottom reflective surfaces, and rotating about a rotary shaft penetrating the top and bottom reflective surfaces to scan beams, falling onto the side reflective surface, in one direction, a first light source emitting first beams to the side reflective surface, a second light source emitting second beams to at least one of the top and bottom reflective surfaces, and a detector receiving beams reflected by the spinning mirror, among the second beams. The beam scanner and the surface measurement apparatus can achieve high-speed, high resolution surface measurement since errors caused by the movement of the spinning mirror for beam scanning are minimized.
Public/Granted literature
- US20100201993A1 BEAM SCANNER AND SURFACE MEASUREMENT APPARATUS Public/Granted day:2010-08-12
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