Invention Grant
US08098412B2 Method for detecting the center of wafer and storage medium storing a program for executing the method
失效
用于检测晶片中心的方法和存储用于执行该方法的程序的存储介质
- Patent Title: Method for detecting the center of wafer and storage medium storing a program for executing the method
- Patent Title (中): 用于检测晶片中心的方法和存储用于执行该方法的程序的存储介质
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Application No.: US11857790Application Date: 2007-09-19
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Publication No.: US08098412B2Publication Date: 2012-01-17
- Inventor: Fumito Kagami
- Applicant: Fumito Kagami
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2006-253062 20060919
- Main IPC: G01B11/14
- IPC: G01B11/14
Abstract:
A method detects a center of a wafer having a notch when aligning the wafer mounted on a movable mounting table. The method includes capturing an image of the wafer by using an imaging unit, the image including the notch; extracting an edge line from the image of the wafer; detecting a shape of the notch from the edge line; and calculating the center of the wafer based on the shape of the notch.
Public/Granted literature
- US20080068618A1 METHOD FOR DETECTING THE CENTER OF WAFER AND STORAGE MEDIUM STORING A PROGRAM FOR EXECUTING THE METHOD Public/Granted day:2008-03-20
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