Invention Grant
US08098968B2 Silicide thermal heaters for silicon-on-insulator nanophotonic devices
失效
用于绝缘体上硅纳米光电器件的硅化物热加热器
- Patent Title: Silicide thermal heaters for silicon-on-insulator nanophotonic devices
- Patent Title (中): 用于绝缘体上硅纳米光电器件的硅化物热加热器
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Application No.: US11849591Application Date: 2007-09-04
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Publication No.: US08098968B2Publication Date: 2012-01-17
- Inventor: William Michael John Green , Hendrik F. Hamann , Yurii A. Vlasov
- Applicant: William Michael John Green , Hendrik F. Hamann , Yurii A. Vlasov
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Michael J. Buchenhorner; Vazken Alexanian
- Main IPC: G02B6/12
- IPC: G02B6/12 ; G02F1/01
Abstract:
A thermally switched Silicon-On-Insulator (SOI) photo electronic device includes a silicon layer including an optical waveguide and a silicide heating element horizontally adjacent to the waveguide. The waveguide has a refractive index that changes with heat applied to the waveguide.
Public/Granted literature
- US20110002576A1 Silicide Thermal Heaters for Silicon-on-Insulator Nanophotonic Devices Public/Granted day:2011-01-06
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