Invention Grant
- Patent Title: Method and apparatus for teaching a workpiece transfer robot
- Patent Title (中): 用于教导工件传送机器人的方法和装置
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Application No.: US11935883Application Date: 2007-11-06
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Publication No.: US08099192B2Publication Date: 2012-01-17
- Inventor: Damon Genetti , Heinrich Von Bunau , Tarek Radwan , Karen Townsend
- Applicant: Damon Genetti , Heinrich Von Bunau , Tarek Radwan , Karen Townsend
- Applicant Address: US CA San Jose
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: G05B19/18
- IPC: G05B19/18

Abstract:
A method is provided for teaching a transfer robot used in conjunction with a workpiece processing system including a pedestal assembly, a light sensor having an optical input fixedly coupled to the pedestal assembly, a transfer robot having an end effector, and a processing chamber containing the pedestal assembly and light sensor. The method includes the steps of producing light within the processing chamber, moving the end effector over the optical input such that amount of light reaching the light sensor varies in relation to the position of the end effector, and recording the signal gain as the end effector is moved over the optical input. The method also includes the step of establishing from the recorded signal gain a desired position of the end effector relative to the pedestal assembly.
Public/Granted literature
- US20090118862A1 METHOD AND APPARATUS FOR TEACHING A WORKPIECE TRANSFER ROBOT Public/Granted day:2009-05-07
Information query
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