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US08099685B2 Model based microdevice design layout correction 有权
基于模型的微型设计布局校正

Model based microdevice design layout correction
Abstract:
Shapes neighboring a potential manufacturing fault within a microdevice design layout are identified. Models are employed to determine the affect of the shapes upon the potential manufacturing fault. Possible adjustments to the shapes are modeled. The possible adjustments facilitating resolution of the potential manufacturing fault.
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