Invention Grant
US08106566B2 Piezoelectric component with outer contacting, having gas-phase deposition, method for manufacturing component and use of component
失效
具有外部接触的压电部件,具有气相沉积,制造部件的方法和部件的使用
- Patent Title: Piezoelectric component with outer contacting, having gas-phase deposition, method for manufacturing component and use of component
- Patent Title (中): 具有外部接触的压电部件,具有气相沉积,制造部件的方法和部件的使用
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Application No.: US12734976Application Date: 2008-11-13
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Publication No.: US08106566B2Publication Date: 2012-01-31
- Inventor: Stefan Denneler , Axel Ganster , Susanne Kornely , Carsten Schuh , Andreas Wolff , Jörg Zapf
- Applicant: Stefan Denneler , Axel Ganster , Susanne Kornely , Carsten Schuh , Andreas Wolff , Jörg Zapf
- Applicant Address: DE Munich
- Assignee: Siemens Aktiengesellschaft
- Current Assignee: Siemens Aktiengesellschaft
- Current Assignee Address: DE Munich
- Agency: Staas & Halsey LLP
- Priority: DE102007058873 20071206
- International Application: PCT/EP2008/065474 WO 20081113
- International Announcement: WO2009/071426 WO 20090611
- Main IPC: H01L41/08
- IPC: H01L41/08

Abstract:
A piezoelectric component with at least one fully active piezoelement has electrode layers and interposed piezoelectric layers guided to a lateral edge of the piezoelement and contacted there. An insulating layer applied for electric contacting has an electric through-plating. An electrically conductive gas-phase deposition layer is applied directly to the electrode layer guided up to the lateral surface of the piezoelement by way of deposition from the gas phase in order to improve electric contacting. An external electrode is applied to the gas-phase deposition layer. In the case of several superposed stacked piezoelements (piezoactuator in multi-layer design), the external electrode functions as a collector electrode which connects the electrode layers to each other. The structure enables secure contacting of the electrode layers. A fully active piezoceramic multi-layer actuator with the described contacting may be used in automobile technology for activating fuel-injection valves.
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