Invention Grant
US08107167B2 Spatial-dispersion-free spectral combining of pulsed high peak power fiber laser beams
有权
脉冲高峰值功率光纤激光束的空间无色散光谱组合
- Patent Title: Spatial-dispersion-free spectral combining of pulsed high peak power fiber laser beams
- Patent Title (中): 脉冲高峰值功率光纤激光束的空间无色散光谱组合
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Application No.: US12435399Application Date: 2009-05-04
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Publication No.: US08107167B2Publication Date: 2012-01-31
- Inventor: Almantas Galvanauskas , Kai-Chung Hou
- Applicant: Almantas Galvanauskas , Kai-Chung Hou
- Applicant Address: US MI Ann Arbor
- Assignee: The Regents of The University of Michigan
- Current Assignee: The Regents of The University of Michigan
- Current Assignee Address: US MI Ann Arbor
- Agency: Marshall, Gerstein & Borun LLP
- Main IPC: G02B27/10
- IPC: G02B27/10 ; H04J14/02 ; H04B10/18

Abstract:
A beam combining system suitable of pulsed fiber laser applications is able to produce non-spatial-dispersive beams using an highly efficient filter, such as a multilayer dielectric filter, in transmission and reflection configurations. The techniques therefore can overcome constraints on laser line-width and beam width and allow for more stable systems for high peak power pulsed laser energy, such as may be used in extreme ultraviolet lithography and other applications.
Public/Granted literature
- US20100277804A1 Spatial-Dispersion-Free Spectral Combining of Pulsed High Peak Power Fiber Laser Beams Public/Granted day:2010-11-04
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