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US08108986B2 Method for manufacturing a perpendicular magnetic write pole having a large bevel angle 有权
用于制造具有大斜角的垂直磁性写入极的方法

Method for manufacturing a perpendicular magnetic write pole having a large bevel angle
Abstract:
A method for manufacturing a magnetic write head for perpendicular magnetic recording, the write head having a write pole with an increased bevel (taper) angle. The write pole is constructed by forming a mask structure over a magnetic write pole material, and then performing a combination of sweeping or rotation with static (non-rotating, non-sweeping) ion milling at an angle relative to normal. The ion milling is performed while moving the wafer laterally within the ion milling tool to ensure that the ion milling is performed uniformly across the wafer during static milling.
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