Invention Grant
- Patent Title: Laser cutting method
- Patent Title (中): 激光切割方法
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Application No.: US11273730Application Date: 2005-11-14
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Publication No.: US08108998B2Publication Date: 2012-02-07
- Inventor: Genji Inada , Junichiro Iri , Masayuki Nishiwaki , Sadayuki Sugama
- Applicant: Genji Inada , Junichiro Iri , Masayuki Nishiwaki , Sadayuki Sugama
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2004-342246 20041126
- Main IPC: H01L21/78
- IPC: H01L21/78 ; H01L21/30 ; H01L21/301

Abstract:
At least one exemplary embodiment is directed to a laser cutting method where a laser beam is condensed at internal points inside a substrate forming processing regions, and where the laser is swept along a cutting line, where the cutting line is associated with a recess on the substrate and where the recess can be formed contemporaneously with the formation of the processing regions.
Public/Granted literature
- US20060113287A1 Laser cutting method Public/Granted day:2006-06-01
Information query
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