Invention Grant
- Patent Title: Constant force mechanical scribers and methods for using same in semiconductor processing applications
- Patent Title (中): 恒力机械刻划机及其在半导体加工应用中的使用方法
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Application No.: US13014286Application Date: 2011-01-26
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Publication No.: US08109004B2Publication Date: 2012-02-07
- Inventor: Alex Shenderovich , Boris Djurovic , Daniel Liu , Wen Chang , Benyamin Buller , Erel Milshtein
- Applicant: Alex Shenderovich , Boris Djurovic , Daniel Liu , Wen Chang , Benyamin Buller , Erel Milshtein
- Applicant Address: US CA Fremont
- Assignee: Solyndra LLC
- Current Assignee: Solyndra LLC
- Current Assignee Address: US CA Fremont
- Agency: Morgan Lewis & Bockius LLP
- Agent Brett Lovejoy
- Main IPC: B43L13/00
- IPC: B43L13/00
Abstract:
A scribing system comprising a mounting mechanism, stylus, and force generating mechanism is provided. The mounting mechanism is configured to rotate an elongated object in such a manner that the object is subjected to a bow effect wherein a middle portion of the object bends relative to the end portions of the object. The stylus is for scribing the object at a position x along the long dimension of the object while the mounting mechanism rotates the object. The force generating mechanism is connected to the stylus so that the stylus applies the same constant force to the elongated object regardless of the position x along the long dimension of the object that the stylus is positioned, while the mounting mechanism rotates the object and thereby subjects the object to the bow effect, thereby scribing the object.
Public/Granted literature
- US20110132170A1 Constant Force Mechanical Scribers and Methods for Using Same In Semiconductor Processing Applications Public/Granted day:2011-06-09
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