Invention Grant
- Patent Title: Gantry positioning system
- Patent Title (中): 龙门定位系统
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Application No.: US11338260Application Date: 2006-01-24
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Publication No.: US08109395B2Publication Date: 2012-02-07
- Inventor: Ajit Gaunekar , Gary Peter Widdowson
- Applicant: Ajit Gaunekar , Gary Peter Widdowson
- Applicant Address: SG Singapore
- Assignee: ASM Technology Singapore Pte Ltd
- Current Assignee: ASM Technology Singapore Pte Ltd
- Current Assignee Address: SG Singapore
- Agency: Ostrolenk Faber LLP
- Main IPC: B66D5/02
- IPC: B66D5/02

Abstract:
A gantry system is provided that comprises a gantry beam having a first section and a second section and first and second motors cooperating to drive the respective first and second sections in parallel directions to position the gantry beam along a linear axis. A flexure is connected between the first and second sections about which the second section is deflectable relative to the first section, which is advantageous to reduce any stresses that may be caused in the gantry system when driving the gantry beam.
Public/Granted literature
- US20070170140A1 Gantry positioning system Public/Granted day:2007-07-26
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