Invention Grant
- Patent Title: Apparatus for storing substrates
- Patent Title (中): 用于存储基板的装置
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Application No.: US11755508Application Date: 2007-05-30
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Publication No.: US08109407B2Publication Date: 2012-02-07
- Inventor: Yi-Li Hsiao , Chen-Hua Yu , Jean Wang , Jui-Pin Hung , Ming-Shih Yeh
- Applicant: Yi-Li Hsiao , Chen-Hua Yu , Jean Wang , Jui-Pin Hung , Ming-Shih Yeh
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: B65D45/28
- IPC: B65D45/28 ; B65D53/06

Abstract:
An apparatus includes an enclosure and a door configured to seal the enclosure. The door includes a plate. A rotational apparatus is disposed over the plate. At least one first member with a first arm extends from a first rib of the first member. At least one second member with a second arm extends from a second rib of the second member. The first and second arms are connected to the rotational apparatus. At least one corner member has a first edge. The first edge has a shape corresponding to a shape of a corner of the frame. The corner member is connected to a first end of the third arm. A second end of the third arm is connected to the rotational apparatus. A sealing material is disposed along a first longitudinal side of the first rib and a second longitudinal side of the second rib.
Public/Granted literature
- US20080295412A1 APPARATUS FOR STORING SUBSTRATES Public/Granted day:2008-12-04
Information query
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