Invention Grant
US08109608B2 Micro-fluid ejection head and stress relieved orifice plate therefor 有权
微流体喷头和应力释放孔板

Micro-fluid ejection head and stress relieved orifice plate therefor
Abstract:
A micro-fluid ejection head and methods for improving the fabrication and operation of the micro-fluid ejection head. The ejection head includes a photoimaged thick film layer attached to a substrate containing fluid ejection actuators. An orifice plate is laminated to the thick film layer. The orifice plate has a plurality of concentric orifices therein and is derived from a first photoresist material that is heated to a temperature sufficient to relieve film stresses in the photoresist material prior to exposing and developing the orifices in the orifice plate.
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