Invention Grant
- Patent Title: Imprinting stamper and method of manufacturing the same
- Patent Title (中): 印刷压模及其制造方法
-
Application No.: US12146489Application Date: 2008-06-26
-
Publication No.: US08109752B2Publication Date: 2012-02-07
- Inventor: Kenya Ohashi , Masahiko Ogino , Akihiro Miyauchi
- Applicant: Kenya Ohashi , Masahiko Ogino , Akihiro Miyauchi
- Applicant Address: JP Tokyo
- Assignee: Hitachi Industrial Equipment Systems Co., Ltd.
- Current Assignee: Hitachi Industrial Equipment Systems Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2007-171415 20070629
- Main IPC: B29C59/00
- IPC: B29C59/00

Abstract:
An imprinting stamper which can transfer a microscopic pattern to a medium bearing a convex area or local projection, with high accuracy. A convexo-concave pattern is formed on a surface of the imprinting stamper. It includes a pattern layer having the convexo-concave pattern; and a stamper backside layer arranged on a backside of the pattern layer. Young's modulus of the pattern layer is 500 MPa to 10 GPa; and Young's modulus of the stamper backside layer is smaller than Young's modulus of the pattern layer.
Public/Granted literature
- US20090004320A1 IMPRINTING STAMPER AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2009-01-01
Information query