Invention Grant
- Patent Title: Substrate supporting device and sputtering apparatus including the same
- Patent Title (中): 基板支撑装置和包括其的溅射装置
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Application No.: US12234994Application Date: 2008-09-22
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Publication No.: US08110078B2Publication Date: 2012-02-07
- Inventor: Kaoru Ito , Hirotoshi Matsui
- Applicant: Kaoru Ito , Hirotoshi Matsui
- Applicant Address: JP Toyota-Shi
- Assignee: Kojima Press Industry Co., Ltd.
- Current Assignee: Kojima Press Industry Co., Ltd.
- Current Assignee Address: JP Toyota-Shi
- Agency: Burr & Brown
- Priority: JP2007-299268 20071119
- Main IPC: C23C14/34
- IPC: C23C14/34

Abstract:
A substrate supporting device for forming a coating film having a maximally even and necessary thickness with a sufficiently strong adhesiveness and a good film quality on a substrate, and a sputtering apparatus including such a substrate supporting device. The substrate supporting device for supporting a substrate on which a coating film is formed by sputtering is disposed in a vacuum chamber so as to be opposed to a sputtering target. The substrate supporting device is rotatable around a first rotation axis by a first driving mechanism and is rotatable around a second rotation axis by a second driving mechanism.
Public/Granted literature
- US20090127109A1 SUBSTRATE SUPPORTING DEVICE AND SPUTTERING APPARATUS INCLUDING THE SAME Public/Granted day:2009-05-21
Information query
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