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US08110250B2 Method for fabricating chemical sensor element 失效
化学传感器元件的制造方法

Method for fabricating chemical sensor element
Abstract:
A chemical sensor that utilizes localized surface Plasmon resonance including a substrate, metal-containing particles and dielectric particles, wherein the metal-containing particles and the dielectric particles are disposed on the substrate, is used as a chemical sensor element. Thereby, a chemical sensor element having a sufficient detecting sensitivity when localized surface Plasmon resonance is utilized, and a method for the fabrication thereof, can be provided.
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