Invention Grant
- Patent Title: Radiation-sensitive composition
- Patent Title (中): 辐射敏感组合物
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Application No.: US12312258Application Date: 2007-11-01
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Publication No.: US08110334B2Publication Date: 2012-02-07
- Inventor: Masatoshi Echigo , Dai Oguro
- Applicant: Masatoshi Echigo , Dai Oguro
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Gas Chemical Company, Inc.
- Current Assignee: Mitsubishi Gas Chemical Company, Inc.
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2006-299522 20061102; JP2007-113185 20070423; JP2007-113186 20070423; JP2007-124918 20070509; JP2007-139763 20070525; JP2007-139764 20070525
- International Application: PCT/JP2007/071346 WO 20071101
- International Announcement: WO2008/053974 WO 20080508
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/09 ; C07C39/04 ; C07C39/08 ; C07C39/10

Abstract:
A radiation-sensitive composition containing a resist compound having a high sensitivity, a high resolution, a high etching resistance, and a low outgas which forms a resist pattern with a good shape is described. Further described is a method of forming a resist pattern using the radiation-sensitive composition. Still further described are a novel composition for forming a photoresist under coat film which is excellent in optical properties and etching resistance and contains substantially no sublimable substance and an under coat film formed by the composition. Still further described are a radiation-sensitive composition containing a solvent and a cyclic compound having a specific structure, for example, a cyclic compound (A) having a molecular weight of 700 to 5000 which is synthesized by the condensation reaction of a compound having 2 to 59 carbon atoms and 1 to 4 formyl groups (aldehyde compound (A1)) with a compound having 6 to 15 carbon atoms and 1 to 3 phenolic hydroxyl groups (phenol compound (A2)), and a cyclic compound for use in the radiation-sensitive composition.
Public/Granted literature
- US20100047709A1 RADIATION-SENSITIVE COMPOSITION Public/Granted day:2010-02-25
Information query
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