An inline process for manufacturing a photovoltaic device on a removable substrate is disclosed. The process discloses two semiconductor layers forming an active region; at least one of the semiconductor layers is formed by a high-purity plasma spray process; optional layers include a release layer, one or more barrier layers, a cap layer, a conductive support layer, a mechanical support layer, an anti-reflection layer, and distributed Bragg reflector. The process may also be used to form multiple active regions.