Invention Grant
- Patent Title: Vacuum jacket for phase change memory element
- Patent Title (中): 相变存储元件真空护套
-
Application No.: US12911554Application Date: 2010-10-25
-
Publication No.: US08110430B2Publication Date: 2012-02-07
- Inventor: Hsiang-Lan Lung
- Applicant: Hsiang-Lan Lung
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes Beffel & Wolfeld LLP
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A memory device including a phase change element and a vacuum jacket. The device includes a first electrode element; a phase change element in contact with the first electrode element; an upper electrode element in contact with the phase change element; a bit line electrode in contact with the upper electrode element; and a dielectric fill layer surrounding the phase change element and the upper electrode element, spaced from the same and sealed by the bit line electrode to define a vacuum jacket around the phase change element and upper electrode element.
Public/Granted literature
- US20110263075A1 Vacuum Jacket For Phase Change Memory Element Public/Granted day:2011-10-27
Information query
IPC分类: