Invention Grant
- Patent Title: Field effect transistor having an asymmetric gate electrode
- Patent Title (中): 具有不对称栅电极的场效应晶体管
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Application No.: US11830316Application Date: 2007-07-30
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Publication No.: US08110465B2Publication Date: 2012-02-07
- Inventor: Huilong Zhu , Qingqing Liang
- Applicant: Huilong Zhu , Qingqing Liang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent H. Daniel Schnurmann
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
The gate electrode of a metal oxide semiconductor field effect transistor (MOSFET) comprises a source side gate electrode and a drain side gate electrode that abut each other near the middle of the channel. In one embodiment, the source side gate electrode comprises a silicon oxide based gate dielectric and the drain side gate electrode comprises a high-k gate dielectric. The source side gate electrode provides high carrier mobility, while the drain side gate electrode provides good short channel effect and reduced gate leakage. In another embodiment, the source gate electrode and drain gate electrode comprises different high-k gate dielectric stacks and different gate conductor materials, wherein the source side gate electrode has a first work function a quarter band gap away from a band gap edge and the drain side gate electrode has a second work function near the band gap edge.
Public/Granted literature
- US20090032889A1 FIELD EFFECT TRANSISTOR HAVING AN ASYMMETRIC GATE ELECTRODE Public/Granted day:2009-02-05
Information query
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