Invention Grant
- Patent Title: Method and device for dividing a plane-parallel plate made of a brittle material into a plurality of individual plates by means of a laser
- Patent Title (中): 通过激光将由脆性材料制成的平面平行板分割成多个单独板的方法和装置
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Application No.: US12218020Application Date: 2008-07-09
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Publication No.: US08110777B2Publication Date: 2012-02-07
- Inventor: Hans-Ulrich Zuehlke , Patrick Mende , Gabriele Eberhardt
- Applicant: Hans-Ulrich Zuehlke , Patrick Mende , Gabriele Eberhardt
- Applicant Address: DE Jena
- Assignee: JENOPTIK Automatisierungstechnik GmbH
- Current Assignee: JENOPTIK Automatisierungstechnik GmbH
- Current Assignee Address: DE Jena
- Agency: Duane Morris LLP
- Priority: DE102007033242 20070712
- Main IPC: B23K26/40
- IPC: B23K26/40 ; H01L21/301 ; C03B32/02 ; B26F3/16

Abstract:
The present invention relates to a method of dividing a plane-parallel plate made of a brittle material into a plurality of individual plates having a specified edge length, in which break-off cuts are made along specified scored lines that form a lattice-like pattern by introducing thermally induced stresses by means of a laser beam, and in which, after making the break-off cuts along a first working direction, the resultant plate strips are spaced out at intervals in that a framed stretch film to which the plane-parallel plate is bonded is stretched by means of a vacuum device. The invention also relates to a device with a special clamping table for use in carrying out the method.
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