Invention Grant
- Patent Title: Real time process monitoring and control for semiconductor junctions
- Patent Title (中): 实时过程监测和半导体连接控制
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Application No.: US13157058Application Date: 2011-06-09
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Publication No.: US08110828B2Publication Date: 2012-02-07
- Inventor: Vedapuram S. Achutharaman , Wen Chang , Tarpan Dixit , Philip Kraus
- Applicant: Vedapuram S. Achutharaman , Wen Chang , Tarpan Dixit , Philip Kraus
- Applicant Address: US CA Fremont
- Assignee: Solyndra LLC
- Current Assignee: Solyndra LLC
- Current Assignee Address: US CA Fremont
- Agency: Morgan, Lewis & Bockius LLP
- Agent Brett Lovejoy
- Main IPC: H01L29/08
- IPC: H01L29/08

Abstract:
A method of manufacturing a semiconductor layer is provided. In a first deposition during a first period of time, at least one Group IIIA element and at least one Group VIA element are deposited on a substrate or on a layer optional disposed on the substrate such as a back-electrode. During a second deposition during a second period of time, at least one Group IB element and the at least one group VIA element are deposited on the substrate or the optional layer. The one Group IB element combines with the Group VIA element to form a IB2VIA composition. A first deposition state is monitored, during the second deposition by making a first plurality of measurements of a first deposition state. The second deposition is terminated or attenuated based on a function of the first plurality of measurements of the indicia of the first deposition state.
Public/Granted literature
- US20110259391A1 REAL TIME PROCESS MONITORING AND CONTROL FOR SEMICONDUCTOR JUNCTIONS Public/Granted day:2011-10-27
Information query
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