Invention Grant
- Patent Title: Micromechanical resonating devices and related methods
- Patent Title (中): 微机械谐振装置及相关方法
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Application No.: US12181531Application Date: 2008-07-29
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Publication No.: US08111108B2Publication Date: 2012-02-07
- Inventor: Alexei Gaidarzhy , Pritiraj Mohanty
- Applicant: Alexei Gaidarzhy , Pritiraj Mohanty
- Applicant Address: US MA Cambridge
- Assignee: Sand9, Inc.
- Current Assignee: Sand9, Inc.
- Current Assignee Address: US MA Cambridge
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: H03B5/30
- IPC: H03B5/30
Abstract:
Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure.
Public/Granted literature
- US20100026136A1 MICROMECHANICAL RESONATING DEVICES AND RELATED METHODS Public/Granted day:2010-02-04
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