Invention Grant
US08111114B2 MEMS filter with voltage tunable center frequency and bandwidth
有权
具有电压可调中心频率和带宽的MEMS滤波器
- Patent Title: MEMS filter with voltage tunable center frequency and bandwidth
- Patent Title (中): 具有电压可调中心频率和带宽的MEMS滤波器
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Application No.: US12299341Application Date: 2007-05-02
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Publication No.: US08111114B2Publication Date: 2012-02-07
- Inventor: Sunil Bhave , Lih Feng Cheow
- Applicant: Sunil Bhave , Lih Feng Cheow
- Applicant Address: US NY Ithaca
- Assignee: Cornell Center for Technology, Enterprise & Commericialization
- Current Assignee: Cornell Center for Technology, Enterprise & Commericialization
- Current Assignee Address: US NY Ithaca
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- International Application: PCT/US2007/068018 WO 20070502
- International Announcement: WO2008/019179 WO 20080214
- Main IPC: H03H9/46
- IPC: H03H9/46 ; H03H3/013

Abstract:
A tunable MEMS filter is disclosed, having a substrate with first and second isolated substrate areas. First and second anchor points are coupled to the substrate. A base is coupled to the first and second anchor points by first and second coupling beams, respectively. A dielectric layer is coupled to the base. An input conductor is coupled to the at least one dielectric layer. An output conductor is coupled to the at least one dielectric layer.A method of tuning a center frequency and a bandwidth of a MEMS resonator filter is also disclosed. A first bias voltage is adjusted between a base layer and input and output conductor layers. A second bias voltage is adjusted between the base layer and isolated substrate areas. The center frequency and the bandwidth are determined until the adjustments to the bias voltages provide a desired center frequency and a desired bandwidth.
Public/Granted literature
- US20090322448A1 MEMS FILTER WITH VOLTAGE TUNABLE CENTER FREQUENCY AND BANDWIDTH Public/Granted day:2009-12-31
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