Invention Grant
- Patent Title: Write-pattern determination for maskless lithography
- Patent Title (中): 无掩模光刻的写模式确定
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Application No.: US12206660Application Date: 2008-09-08
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Publication No.: US08111380B2Publication Date: 2012-02-07
- Inventor: Daniel S. Abrams , Timothy Lin
- Applicant: Daniel S. Abrams , Timothy Lin
- Applicant Address: US CA Palo Alto
- Assignee: Luminescent Technologies, Inc.
- Current Assignee: Luminescent Technologies, Inc.
- Current Assignee Address: US CA Palo Alto
- Agency: Wilson Sonsini Goodrich & Rosati
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/44 ; G03B27/32 ; G03B27/68 ; G03B27/42

Abstract:
A method for generating a write pattern to be used in a maskless-lithography process is described. During the method, a computer system determines a one-to-one correspondence between pixels in the write pattern and at least a subset of elements in a spatial-light modulator used in the maskless-lithography process. Furthermore, the computer system generates the write pattern. Note that the write pattern includes features corresponding to at least the subset of elements in the spatial-light modulator, and the generating is in accordance with a characteristic dimension of an element in the spatial-light modulator and a target pattern that is to be printed on a semiconductor wafer during the maskless-lithography process.
Public/Granted literature
- US20090073413A1 Write-Pattern Determination for Maskless Lithography Public/Granted day:2009-03-19
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