Invention Grant
US08111381B2 Positioning apparatus, exposure apparatus and device manufacturing method 有权
定位装置,曝光装置及装置的制造方法

Positioning apparatus, exposure apparatus and device manufacturing method
Abstract:
A positioning apparatus includes a stage movable on a base, an actuator which drives the stage and a driver which supplies current to the actuator. The apparatus further includes a current supply path having a plurality of parallel paths connecting the driver and the actuator. The current supply path includes a plurality of forward electrical wires and a plurality of backward electrical wires. The apparatus also includes a detector which detects a break of the current supply path based on a current of at least one of the plurality of parallel paths. The detector detects a break of the current supply path based on a total current of at least one of the plurality of forward electrical wires and at least one of the plurality of backward electrical wires.
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