Invention Grant
- Patent Title: Method for measuring thermo-optically induced material phase-change response in a multiple layer thin film structure using visible and ultraviolet spectroscopy
- Patent Title (中): 使用可见光和紫外光谱测量多层薄膜结构中的热光诱导材料相变响应的方法
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Application No.: US12484902Application Date: 2009-06-15
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Publication No.: US08111384B2Publication Date: 2012-02-07
- Inventor: Carlos L. Ygartua , Lei Zhong , John McCormack , Robert J. McClelland
- Applicant: Carlos L. Ygartua , Lei Zhong , John McCormack , Robert J. McClelland
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G01B11/16
- IPC: G01B11/16
Abstract:
A method and device for facilitating measurement of thermo-optically induced material phase change response in a thin planar or a grating film stack is disclosed. The method may include using small-spot visible and ultraviolet spectra (ellipsometric or reflectance) for measuring a material phase change response. The device may include a measurement system platform, at least one electrical resistor, at least one external electric probe, and ohmic contact circuitry.
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