Invention Grant
US08111899B2 Substrate-check equipment 有权
基板检查设备

  • Patent Title: Substrate-check equipment
  • Patent Title (中): 基板检查设备
  • Application No.: US12218005
    Application Date: 2008-07-10
  • Publication No.: US08111899B2
    Publication Date: 2012-02-07
  • Inventor: Hui-Hsiung Lee
  • Applicant: Hui-Hsiung Lee
  • Main IPC: G01N21/00
  • IPC: G01N21/00 G06K9/00
Substrate-check equipment
Abstract:
A substrate-check equipment has a conveyer, at least two lamps, at least two image acquisition units and a control unit. The conveyer conveys a substrate. The lamps are mounted respectively above and below the conveyer to respectively shine light onto the substrate. Each lamp has an adjusting unit for adjusting intensity of the lamp. The image acquisition units correspond to the lamps and are mounted respectively above and below the conveyer to respectively capture images of the substrate and generate image signals. The control unit is electronically connected to the lamp and the image acquisition units. Emitted light intensity of the lamps is adjusted to ensure consistent image quality and speed up procedures for checking the substrate.
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