Invention Grant
US08112168B2 Process and method for a decoupled multi-parameter run-to-run controller
有权
解耦多参数运行到运行控制器的过程和方法
- Patent Title: Process and method for a decoupled multi-parameter run-to-run controller
- Patent Title (中): 解耦多参数运行到运行控制器的过程和方法
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Application No.: US12511370Application Date: 2009-07-29
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Publication No.: US08112168B2Publication Date: 2012-02-07
- Inventor: Madhu Sudan Ramavajjala , Kristi Bushman , Robert Ray Spangler , Stephen Arlon Meinser , Ronald Charles Roth
- Applicant: Madhu Sudan Ramavajjala , Kristi Bushman , Robert Ray Spangler , Stephen Arlon Meinser , Ronald Charles Roth
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Jacqueline J. Garner; Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: G06F19/00
- IPC: G06F19/00
Abstract:
A manufacturing process including a controller method to generate a tool setting which includes a tool offset and a device offset. The controller method uses a device parameter measurement to update the tool offset and device offset. A tool weight and a device weight is assigned so that only one of the tool offset and device offset is significantly changed during the update. The process may be applied to semiconductor device manufacturing and particularly to integrated circuit fabrication.
Public/Granted literature
- US20110029119A1 Process and Method for a Decoupled Multi-Parameter Run-to-Run Controller Public/Granted day:2011-02-03
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