Invention Grant
- Patent Title: Polishing apparatus and polishing method
- Patent Title (中): 抛光设备和抛光方法
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Application No.: US12881522Application Date: 2010-09-14
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Publication No.: US08112169B2Publication Date: 2012-02-07
- Inventor: Yoichi Kobayashi , Yasumasa Hiroo , Tsuyoshi Ohashi
- Applicant: Yoichi Kobayashi , Yasumasa Hiroo , Tsuyoshi Ohashi
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2004-183063 20040621
- Main IPC: G05B13/02
- IPC: G05B13/02 ; G06F19/00 ; B24B49/00 ; B24B51/00

Abstract:
A polishing apparatus has a polishing table having a polishing surface and a top ring for pressing a substrate against the polishing surface while independently controlling pressing forces applied to a plurality of areas on the substrate. The polishing apparatus has a sensor for monitoring substrate conditions of a plurality of measurement points on the substrate, a monitor unit for performing a predetermined arithmetic process on a signal from the sensor to generate a monitor signal, and a controller for comparing the monitor signal of the measurement points with the reference signal and controlling the pressing forces of the top ring so that the monitor signal of the measurement point converges on the reference signal.
Public/Granted literature
- US20100330878A1 POLISHING APPARATUS AND POLISHING METHOD Public/Granted day:2010-12-30
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