A method for collecting data from semiconductor equipment includes selecting a plurality of data values to request from semiconductor equipment and assigning each of the data values to a chamber. Each chamber is associated with an engine that processes the data values in the associated chamber to detect a fault in the semiconductor equipment. The method also includes determining an order to receive the data values from the semiconductor equipment, and, after the order for the data values is determined, communicating a setup message requesting the semiconductor equipment to communicate the data values in the predetermined order. The method further includes receiving the data values from the semiconductor equipment and providing each of the received data values to the particular engine associated with the chamber of the data value.