Invention Grant
US08112752B2 Method for performing a software process, controller and lithographic apparatus
有权
用于执行软件处理,控制器和光刻设备的方法
- Patent Title: Method for performing a software process, controller and lithographic apparatus
- Patent Title (中): 用于执行软件处理,控制器和光刻设备的方法
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Application No.: US11175035Application Date: 2005-07-06
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Publication No.: US08112752B2Publication Date: 2012-02-07
- Inventor: Johannes Theodorus Guillielmus Maria Van De Ven , Robbert Jaap Van Der Kruk
- Applicant: Johannes Theodorus Guillielmus Maria Van De Ven , Robbert Jaap Van Der Kruk
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G06F9/46
- IPC: G06F9/46 ; G06F19/00

Abstract:
A method for performing a software process, such as a real time software process, is disclosed, the process having a plurality of tasks, the method including starting a task of the plurality of tasks of the process, monitoring a progress of the started task, comparing the progress with a desired progress, if the progress does not meet the desired progress, skipping at least a part of a task of the plurality of tasks, and performing the process making use of an outcome of the tasks which have been completed. The monitoring of the progress may be performed upon completion of the task or at a predetermined moment in time.
Public/Granted literature
- US20070011677A1 Method for performing a software process, controller and lithographic apparatus Public/Granted day:2007-01-11
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