Invention Grant
- Patent Title: Capacitive accelerometer
- Patent Title (中): 电容式加速度计
-
Application No.: US12517068Application Date: 2007-12-05
-
Publication No.: US08113054B2Publication Date: 2012-02-14
- Inventor: Chang-Han Je , Gunn Hwang , Sung-Hae Jung , Myung-Lae Lee , Chang-Auck Choi
- Applicant: Chang-Han Je , Gunn Hwang , Sung-Hae Jung , Myung-Lae Lee , Chang-Auck Choi
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Priority: KR10-2006-0122551 20061205; KR10-2007-0043804 20070504
- International Application: PCT/KR2007/006284 WO 20071205
- International Announcement: WO2008/069573 WO 20080612
- Main IPC: G01P15/125
- IPC: G01P15/125

Abstract:
A conventional capacitive accelerometer has a limitation in reducing a distance between a sensing electrode and a reference electrode, and requires a complex process and a separate method of correcting a clearance difference caused by a process error. However, the capacitive accelerometer of the present invention has high sensitivity, can be simply manufactured by maintaining a very narrow distance between a reference electrode and a sensing electrode, and can make it unnecessary to individually correct each manufactured accelerometer by removing or drastically reducing a functional difference due to a process error.
Public/Granted literature
- US20100050771A1 CAPACITIVE ACCELEROMETER Public/Granted day:2010-03-04
Information query
IPC分类: