Invention Grant
- Patent Title: Method and apparatus for forming and texturing process shields
- Patent Title (中): 用于形成和纹理化过程屏蔽的方法和设备
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Application No.: US12191882Application Date: 2008-08-14
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Publication No.: US08117878B1Publication Date: 2012-02-21
- Inventor: Alan R. Popiolkowski , Shannon M. Hart
- Applicant: Alan R. Popiolkowski , Shannon M. Hart
- Applicant Address: US CA San Jose
- Assignee: Novellus System, Inc.
- Current Assignee: Novellus System, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Okamoto & Benedicto LLP
- Main IPC: B21B27/00
- IPC: B21B27/00

Abstract:
A textured process shield and similar parts may be formed and textured in the same forming process using a mandrel. The mandrel may have movable portions that may be set into a forming die position to form and texture a workpiece into a process shield and collapsed to allow the process shield to be removed from the mandrel. The movable portions may include several textured shoes supported by movable jaws. The movable portions may also include a contact surface having angled indentations.
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