Invention Grant
- Patent Title: Chemical mechanical polishing pad having window with integral identification feature
- Patent Title (中): 化学机械抛光垫,具有整体识别特征的窗户
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Application No.: US12397535Application Date: 2009-03-04
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Publication No.: US08118641B2Publication Date: 2012-02-21
- Inventor: Mary Jo Kulp , Ethan S. Simon , Darrell String
- Applicant: Mary Jo Kulp , Ethan S. Simon , Darrell String
- Applicant Address: US DE Newark
- Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Current Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Current Assignee Address: US DE Newark
- Agent Thomas S. Deibert
- Main IPC: B24B49/00
- IPC: B24B49/00

Abstract:
Chemical mechanical polishing pads having a window with an integral identification feature, wherein the window has a polishing face and a nonpolishing face, wherein the integral identification feature is observable through the window, and wherein the integral identification feature identifies the chemical mechanical polishing pad as a type of chemical mechanical polishing pad selected from a plurality of types of chemical mechanical polishing pads. Also provided is a method of making such chemical mechanical polishing pads and for using them to polish a substrate selected from a magnetic substrate, an optical substrate and a semiconductor substrate.
Public/Granted literature
- US20100227533A1 Chemical Mechanical Polishing Pad Having Window With Integral Identification Feature Public/Granted day:2010-09-09
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