Invention Grant
US08118641B2 Chemical mechanical polishing pad having window with integral identification feature 有权
化学机械抛光垫,具有整体识别特征的窗户

Chemical mechanical polishing pad having window with integral identification feature
Abstract:
Chemical mechanical polishing pads having a window with an integral identification feature, wherein the window has a polishing face and a nonpolishing face, wherein the integral identification feature is observable through the window, and wherein the integral identification feature identifies the chemical mechanical polishing pad as a type of chemical mechanical polishing pad selected from a plurality of types of chemical mechanical polishing pads. Also provided is a method of making such chemical mechanical polishing pads and for using them to polish a substrate selected from a magnetic substrate, an optical substrate and a semiconductor substrate.
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