Invention Grant
US08119429B2 Method for fabricating nitride semiconductor laser device and nitride semiconductor laser device
失效
氮化物半导体激光器件和氮化物半导体激光器件的制造方法
- Patent Title: Method for fabricating nitride semiconductor laser device and nitride semiconductor laser device
- Patent Title (中): 氮化物半导体激光器件和氮化物半导体激光器件的制造方法
-
Application No.: US11953459Application Date: 2007-12-10
-
Publication No.: US08119429B2Publication Date: 2012-02-21
- Inventor: Satoshi Tamura , Hiroshi Ohno , Norio Ikedo , Masao Kawaguchi
- Applicant: Satoshi Tamura , Hiroshi Ohno , Norio Ikedo , Masao Kawaguchi
- Applicant Address: JP Osaka
- Assignee: Pansonic Corporation
- Current Assignee: Pansonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2006-335528 20061213
- Main IPC: H01L21/302
- IPC: H01L21/302 ; H01L21/461

Abstract:
A p-type GaN guiding layer, an n-type GaN layer, and an n-type AlGaN current blocking layer are sequentially formed over an active layer, and then part of the current blocking layer is etched by using an alkali solution and irradiating the part with light to form an opening. Thereafter, a second p-type GaN guiding layer is formed on the current blocking layer to cover the opening. In this structure, the GaN layer has a smaller energy gap than the AlGaN current blocking layer.
Public/Granted literature
- US20080144684A1 METHOD FOR FABRICATING NITRIDE SEMICONDUCTOR LASER DEVICE AND NITRIDE SEMICONDUCTOR LASER DEVICE Public/Granted day:2008-06-19
Information query
IPC分类: